Cavity resonators integrated on MMIC and oscillators incorporating the same
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United States of America Patent
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Apr 7, 2015
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Jul 13, 2012
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Jul 14, 2011
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Abstract
A cavity resonator integrated on a monolithic microwave integrated circuit (MMIC) is provided. The cavity resonator includes a cavity defined by an upper metal surface and a lower metal surface embedded in a low conductivity semiconductor, and a plurality of discrete metal connections coupled between the upper and lower metal surfaces, and at least one port for coupling to the cavity electromagnetically.
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