Substrate processing system, method of confirmation of its state of use, and method of prevention of illicit use

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United States of America Patent

PATENT NO 8996422
APP PUB NO 20070272151A1
SERIAL NO

11659878

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Abstract

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[PROBLEM] To enable confirmation of whether a substrate processing system is being illicitly used and preventing that use when there is the fact of illicit use.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 1408601 ?1408601
NIKON SYSTEMS INC2-3-3 MINATOMIRAI NISHI-KU YOKOHAMA-CITY KANAGAWA 220-6116

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okita, Shinichi Tokyo, JP 24 546
Suzuki, Hiroyuki Tokyo, JP 847 10497
Yamaguchi, Tadashi Yokohama, JP 168 1697

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