Charged particle source with light monitoring for tip temperature determination
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United States of America Patent
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Mar 31, 2015
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Oct 20, 2011
filing date -
Jun 12, 2009
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Abstract
Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.
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