Microfluidic device and microtube thereof
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United States of America Patent
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Mar 31, 2015
Grant Date -
Feb 13, 2014
app pub date -
Oct 8, 2013
filing date -
Mar 3, 2008
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Abstract
A micromachined tube (microtube) suitable for microfluidic devices. The microtube is formed by isotropically etching a surface of a first substrate to define therein a channel having an arcuate cross-sectional profile, and forming a substrate structure by bonding the first substrate to a second substrate so that the second substrate overlies and encloses the channel to define a passage having a cross-sectional profile of which at least half is arcuate. The substrate structure is thinned to define the microtube and walls thereof that surround the passage.
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