Anodizing apparatus
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United States of America Patent
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Mar 31, 2015
Grant Date -
Jun 7, 2012
app pub date -
Dec 2, 2011
filing date -
Dec 2, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
An apparatus for anodizing substrates immersed in an electrolyte solution. A substrate holder mounted in a storage tank includes a first support unit having first support elements for supporting, in a liquid-tight condition, only lower circumferential portions of the substrates, and a second support unit attachable to and detachable from the first support unit and having second support elements for supporting, in a liquid-tight condition, remaining circumferential portions of the substrates. A drive mechanism separates the first support unit and the second support unit when loading and unloading the substrates, and for connecting the first support unit and the second support unit after the substrates are placed in the substrate holder.
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