Transfer system
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United States of America Patent
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Mar 24, 2015
Grant Date -
Aug 22, 2013
app pub date -
Feb 13, 2013
filing date -
Feb 16, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
A transfer system includes a substrate positioning device, robots having a first robot and a second robot; and robot control devices, the robot control devices including a first robot control device to which the first robot and the substrate positioning device are connected and a second robot control device to which the second robot is connected. The first robot control device includes an acquiring unit configured to acquire, from the substrate positioning device, at least an absolute deviation amount between the rotation center of the mounting table and a center position of the substrate positioned, and a transmitting unit configured to transmit correction information relying on the absolute deviation amount acquired by the acquiring unit, to the second robot control device to which the second robot is connected.
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