Fabricating a small-scale radiation detector
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United States of America Patent
Stats
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Mar 24, 2015
Issued Date -
N/A
app pub date -
May 3, 2013
filing date -
May 3, 2013
priority date (Note) -
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Abstract
A method for a constructing radiation detector includes fabricating a multi-layer structure upon a wafer, the multi-layer structure comprising a plurality of metal layers, a plurality of sacrificial layers, and a plurality of insulating layers, forming a cavity within the multi-layer structure, filling the cavity with a gas that ionizes in response to nuclear radiation, and sealing the gas within the cavity.
First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
INTERNATIONAL BUSINESS MACHINES CORPORATION | NEW ORCHARD ROAD ARMONK NY 10504 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Gordon, Michael S | Yorktown Heights, US | 248 | 3174 |
# of filed Patents : 248 Total Citations : 3174 | |||
Jahnes, Christopher V | Upper Saddle River, US | 87 | 1888 |
# of filed Patents : 87 Total Citations : 1888 | |||
Joseph, Eric A | White Plains, US | 97 | 851 |
# of filed Patents : 97 Total Citations : 851 | |||
Miyazoe, Hiroyuki | White Plains, US | 104 | 958 |
# of filed Patents : 104 Total Citations : 958 | |||
Rodbell, Kenneth P | Sandy Hook, US | 127 | 1667 |
# of filed Patents : 127 Total Citations : 1667 | |||
Sharma, Arun | New Rochelle, US | 103 | 1063 |
# of filed Patents : 103 Total Citations : 1063 | |||
Sri-Jayantha, Sri M | Ossining, US | 111 | 1337 |
# of filed Patents : 111 Total Citations : 1337 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 24, 2026 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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Legal Events
Date | Code | Event | Description |
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Jul 17, 2022 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 8 |
Jul 16, 2018 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551) year of fee payment: 4 |
Mar 24, 2015 | I | Issuance | |
Mar 04, 2015 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Nov 06, 2014 | P | Published | |
May 03, 2013 | F | Filing | |
May 03, 2013 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GORDON, MICHAEL S.;JAHNES, CHRISTOPHER V.;JOSEPH, ERIC A.;AND OTHERS;SIGNING DATES FROM 20130410 TO 20130424;REEL/FRAME:030348/0695 Owner name: INTERNATIONAL BUSINESS MACHINES CORPORATION, NEW Y |

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