Fabricating a small-scale radiation detector

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United States of America Patent

PATENT NO 8987031
SERIAL NO

13886646

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Abstract

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A method for a constructing radiation detector includes fabricating a multi-layer structure upon a wafer, the multi-layer structure comprising a plurality of metal layers, a plurality of sacrificial layers, and a plurality of insulating layers, forming a cavity within the multi-layer structure, filling the cavity with a gas that ionizes in response to nuclear radiation, and sealing the gas within the cavity.

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INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gordon, Michael S Yorktown Heights, US 248 3174
Jahnes, Christopher V Upper Saddle River, US 87 1888
Joseph, Eric A White Plains, US 97 851
Miyazoe, Hiroyuki White Plains, US 104 958
Rodbell, Kenneth P Sandy Hook, US 127 1667
Sharma, Arun New Rochelle, US 103 1063
Sri-Jayantha, Sri M Ossining, US 111 1337

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