Fine droplet atomization for liquid precursor vaporization
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United States of America Patent
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Mar 24, 2015
Grant Date -
Nov 7, 2013
app pub date -
Jul 9, 2013
filing date -
Feb 5, 2010
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Abstract
A method for forming a droplet aerosol for vaporization and subsequent thin film deposition on a substrate. The method includes drawing a gas from a compressed gas source and drawing a liquid from a liquid source. The liquid and gas are conjoined in either a coaxial flow relationship or a radial flow relationship or an angular relationship between radial and coaxial flow wherein the gas engages the liquid to form droplets suitable for vaporization and subsequent thin film deposition on a substrate.
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