Method and apparatus to support a cleanspace fabricator
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United States of America Patent
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Mar 24, 2015
Grant Date -
Sep 12, 2013
app pub date -
Mar 15, 2013
filing date -
Aug 18, 2005
priority date (Note) -
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Abstract
The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools. Support aspects include support structure for processing tools, a clean environment carrier for a single substrate and a quick disconnect flange which facilities connecting and disconnect of electrical, liquid and gas utilities to a processing tool placed in the fabricator. Methods of installing processing tools and for producing substrates in this environment are provided.
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