Microelectromechanical system with balanced center of mass
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United States of America Patent
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Mar 17, 2015
Grant Date -
Nov 15, 2012
app pub date -
May 12, 2011
filing date -
May 12, 2011
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Abstract
MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. A MEMS device includes a substrate and a released structure connected to the substrate via a flexure. The released structure includes a frame rotatable with respect to the substrate, and an elongate first member having a longitudinal axis extending perpendicularly from an undersurface of the frame and a free end remote from the frame. A recess is formed in an end face of the free end. The recess has a longitudinal axis substantially parallel to the longitudinal axis of the first member and a transverse area smaller than an area of the end face.
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