Method of manufacturing multi-level metal thin film and apparatus for manufacturing the same
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United States of America Patent
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Mar 17, 2015
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Jun 23, 2011
app pub date -
Sep 4, 2008
filing date -
Sep 4, 2008
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Abstract
Provided are methods and apparatuses for manufacturing a multilayer metal thin film without additional heat treatment processes. The method of manufacturing a multilayer metal thin film including steps of: (a) forming a first metal layer on a substrate by flowing a first metal precursor into a first reaction container; and (b) forming a second metal layer on the first metal layer by flowing a second metal precursor into a second reaction container, wherein the step (b) is performed in a range of a heat treatment temperature of the first metal layer so that the second metal layer is formed as the first metal layer is heat-treated.
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