Megasonic cleaning system
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United States of America Patent
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Mar 17, 2015
Grant Date -
Feb 12, 2009
app pub date -
Aug 9, 2007
filing date -
Aug 9, 2007
priority date (Note) -
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Abstract
A system for cleaning semiconductor packages is provided which includes a pickhead that is configured to hold the semiconductor packages in an array arrangement and a plurality of nozzles, each of which is constructed and arranged to project a separate jet of cleaning fluid upwardly against the semiconductor packages. A megasonic energy generator is coupled for imparting megasonic energy to the cleaning fluid and a driving device drives relative movement between the plurality of nozzles and the pickhead to direct the said jets to clean the array of packages on the pickhead.
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