Method for forming isolation structure

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United States of America Patent

PATENT NO 8969172
APP PUB NO 20130214383A1
SERIAL NO

13881560

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Abstract

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[Problem] To provide a method for forming an isolation structure having a low shrinkage percentage and a low tensile stress.

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Patent Owner(s)

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MERCK PATENT GMBHGERMANY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nagahara, Tatsuro Shizuoka, JP 38 144
Nakamoto, Naoko Shizuoka, JP 7 11
Sugahara, Shinji Shizuoka, JP 2 9
Suzuki, Katsuchika Shizuoka, JP 4 14

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