Electrostatic MEMS devices with high reliability
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United States of America Patent
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Feb 24, 2015
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N/A
app pub date -
May 24, 2011
filing date -
Apr 7, 2010
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Abstract
The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.
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