Templates having high contrast alignment marks

United States of America Patent

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Feb 24, 2015
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Aug 11, 2011
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Feb 4, 2011
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Feb 5, 2010

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Abstract

Described are systems and methods for formation of templates having alignment marks with high contrast material. High contrast material may be positioned within recesses of alignment marks.

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CANON NANOTECHNOLOGIES INC	PO BOX 81536 AUSTIN TX 78708

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Inventor Name	Address	# of filed Patents	Total Citations
Selinidis, Kosta S	Austin, US	24	198

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Templates having high contrast alignment marks

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13021461

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PATENT NO	8961852
APP PUB NO	20110192302A1
SERIAL NO	13021461
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
February 24, 2015	US,8961852,B2 US8961852B2	GRANTED PATENT AS SECOND PUBLICATION
August 11, 2011	US,20110192302,A1 US20110192302A1	FIRST PUBLISHED PATENT APPLICATION

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13021461

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