Deposition substrate of deposition apparatus, method of forming layer using the same, and method of manufacturing organic light emitting diode display device
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United States of America Patent
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Feb 10, 2015
Grant Date -
Oct 10, 2013
app pub date -
Jul 7, 2010
filing date -
Jul 10, 2009
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Abstract
Provided are a deposition substrate of a deposition apparatus, a method of forming a layer using the same, and a method of manufacturing an organic light emitting diode (OLED) display device. The method of forming a layer using the deposition substrate includes preparing a substrate, forming a heating conductive layer for Joule heating on the substrate, forming a first insulating layer on the heating conductive layer for Joule heating and including a groove or hole, forming a deposition material layer on a top surface of the first insulating layer having the groove or hole, and applying an electric field to the heating conductive layer for Joule heating to perform Joule-heating on the deposition material layer. Thus, the method is suitable for manufacturing a large-sized device.
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