Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
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United States of America Patent
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Feb 10, 2015
Grant Date -
Jun 17, 2010
app pub date -
Dec 8, 2009
filing date -
Dec 9, 2008
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Abstract
A silica glass crucible for pulling up a silicon single crystal including an outer layer formed from a natural silica glass layer, and an inner layer formed from a synthetic silica glass layer, wherein the synthetic silica glass layer includes a first synthetic silica glass layer formed in a region within a certain range from the center of a crucible bottom section, and a second synthetic silica glass layer formed in a region which excludes the formation region of the first synthetic silica glass layer, and wherein the first synthetic silica glass layer has a thickness of 0.5 mm or more and 1.5 mm or less and a concentration of an OH group included in the first synthetic silica glass layer being 100 ppm or less.
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