Parallel-plate structure fabrication method
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United States of America Patent
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Feb 10, 2015
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Mar 18, 2010
app pub date -
Sep 14, 2007
filing date -
Sep 18, 2006
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Abstract
A fabrication method for parallel-plate structures and a parallel-plate structure arrangement, wherein the structures have a middle layer, grown on a substrate and disposed between top and bottom electrode layers, wherein the middle layer and the top and bottom electrode layers are deposited on a bottom substrate, and wherein the middle layer is grown first and the top and bottom electrodes are essentially deposited afterwards.
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