Pressure transducer using ceramic diaphragm
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United States of America Patent
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Feb 3, 2015
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N/A
app pub date -
Oct 10, 2012
filing date -
Oct 10, 2012
priority date (Note) -
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Abstract
A pressure transducer using a ceramic diaphragm which is not easily damaged so that there is no risk of leakage of a target medium to be measured, having a superior mass-production capability and a reduced volume and enabling low-price by simplifying a flexible cable and a printed circuit board (PCB) to connect the transducer and a signal processing chip. The pressure transducer includes the ceramic diaphragm formed as a rectangular planar ceramic diaphragm and having a surface having formed thereon a pattern made of an electrically conductive material and strain gages; a base plate configured to face the surface of the ceramic diaphragm having formed thereon the pattern; and an adhesive layer configured to be formed along edges of a contacting surface of the ceramic diaphragm and the base plate so as to bond the ceramic diaphragm and the base plate and form a space for the strain gages.
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