Method for producing gas barrier plastic molded body
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United States of America Patent
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Jan 13, 2015
Grant Date -
Dec 5, 2013
app pub date -
Dec 28, 2011
filing date -
Dec 28, 2010
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Abstract
Provided is a method for producing a gas barrier plastic molded body by forming a gas barrier thin film which is substantially colorless and has gas barrier properties, on the surface of a plastic molded body by a heating element CVD method using only raw material gases that are highly safe. The method for producing a gas barrier plastic molded body according to the present invention is a method for producing a gas barrier plastic molded body (90) by forming a gas barrier thin film (92) on the surface of a plastic molded body (91), the method comprising: a film-forming process in which the gas barrier thin film (92) is formed on the surface of the plastic molded body by a heating element CVD method, using an organosilane-based compound represented by formula (Chemical Formula 1) as a main raw material gas, using an oxidizing gas as an additive gas, and using a heating element containing tantalum (Ta) as a main constituent element:
wherein in Chemical Formula 1, n represents 2 or 3; and X represents SiH3, H, or NH2.
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