Scanning probe microscope and method of operating the same
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United States of America Patent
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Dec 30, 2014
Grant Date -
Dec 25, 2014
app pub date -
Dec 24, 2013
filing date -
Jun 20, 2013
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Abstract
Provided are a scanning probe microscope and a method of operating the same. The scanning probe microscope includes a chuck configured to fix an object. A stacker is configured to load one or more cantilevers onto a head module. A stacker lifting element is configured to move the stacker in an up and down direction.
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