Dual scanning stage
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United States of America Patent
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Dec 30, 2014
Issued Date -
N/A
app pub date -
Sep 14, 2012
filing date -
Jul 23, 2009
priority date (Note) -
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Abstract
A system having a beam for providing movement of a first stage and a second stage in a Y axis. The first stage receives a first substrate. A first motor provides movement for the first stage in an X axis. The second stage receives a second substrate. A second motor provides movement for the second stage in the X axis. The first stage and the second stage move together in the Y axis and independently in the X axis. A robot loads substrates onto the first stage and the second stage. A controller directs the robot to load a second substrate onto the second stage while simultaneously directing the first stage and the guide beam to scan a first substrate.
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