Gas laser pre-ionization optical monitoring and compensation
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United States of America Patent
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Dec 30, 2014
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N/A
app pub date -
Sep 21, 2012
filing date -
Oct 4, 2011
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Abstract
A slab laser includes first and second slabs defining an ionizing chamber intermediate the first slab and the second slab. A Radio Frequency Power Amplifier (RFPA) generates pulses to the ionizing chamber. The laser has a viewing window with access to the ionizing chamber and an optical sensor mounted to access the ionizing chamber through the viewing window. A controller is in communication with the optical sensor, and varies RFPA pulse power in response to the detection of glowing plasma by the optical sensor.
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