Salt, resist composition and method for producing resist pattern

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United States of America Patent

PATENT NO 8921028
SERIAL NO

13414267

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Abstract

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A salt represented by the formula (I) and a resist composition containing the salt are provided,

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Patent Owner(s)

Patent OwnerAddress
TRANSPO INDUSTRIES INC20 JONES STREET NEW ROCHELLE NY 10801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Koji Osaka, JP 316 1995
Yamaguchi, Satoshi Osaka, JP 243 2585

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