Method and apparatus for cleaning grinding work chuck using a vacuum

United States of America Patent

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Dec 23, 2014
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Jul 3, 2014
app pub date
Dec 27, 2012
filing date
Dec 27, 2012

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Abstract

A vacuum assembly for removing debris formed on the surface of a work chuck after a wafer grinding process by positioning a vacuum source above the work chuck and then activating the vacuum source.

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Patent Owner(s)

Patent Owner	Address
REVASUM INC	825 BUCKLEY ROAD SAN LUIS OBISPO CA 93401

International Classification(s)

B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Vogtmann, Michael	Paso Robles, US	11	87

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Method and apparatus for cleaning grinding work chuck using a vacuum

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13694723

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PATENT NO	8915771
APP PUB NO	20140187128A1
SERIAL NO	13694723
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
December 23, 2014	US,8915771,B2 US8915771B2	GRANTED PATENT AS SECOND PUBLICATION
July 03, 2014	US,20140187128,A1 US20140187128A1	FIRST PUBLISHED PATENT APPLICATION

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13694723

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