Pressure control apparatus for supercritical fluid
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United States of America Patent
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Dec 23, 2014
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app pub date -
Oct 27, 2010
filing date -
Oct 28, 2009
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Abstract
A pressure control apparatus for a supercritical fluid according to the present invention includes: a valve comprising; a valve chamber provided in a midway of a channel through which a supercritical fluid passes; and an electrically-operated valve element located in the valve chamber; a pressure detection member for detecting the pressure of the supercritical fluid in the channel on an upstream or downstream side of the valve chamber; an open/close control member for controlling the pressure detected by the pressure detection member to be a target pressure; and a valve-opening rate adjustment member for adjusting the valve-opening rate when the valve is opened based on the state of the supercritical fluid.
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