Dose-data generating apparatus

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United States of America Patent

PATENT NO 8914766
SERIAL NO

13932023

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Abstract

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According to one embodiment, generating virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an outer side of a shot edge, and calculating dose data of the measurement region and a non-measurement region based on data in the measurement region and the virtual data are included.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATION1-21 SHIBAURA 3-CHOME MINATO-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koike, Takashi Mie, JP 121 1327
Okamoto, Yosuke Mie, JP 28 159

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