Semiconductor device having alignment mark

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United States of America Patent

PATENT NO 8912671
SERIAL NO

13896243

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Abstract

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A semiconductor device including a substrate and at least one alignment mark disposed on the substrate and having at least one hollow pattern. Therefore, the identification rate of the alignment mark can be high by the hollow pattern.

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Patent Owner(s)

Patent OwnerAddress
HIMAX TECHNOLOGIES LIMITEDTAINAN CITY 74148

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tsai, Po-Yang Tainan, TW 1 0
Wu, Chan-Liang Tainan, TW 9 56

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