Method and device for coating substrates from the vapor phase

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United States of America Patent

PATENT NO 8911555
APP PUB NO 20120177824A1
SERIAL NO

13387402

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Abstract

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In a method for coating substrates with materials to be vaporized in a vacuum coating system, the vaporization material is deposited on the substrate by double vaporization using an intermediate carrier. The intermediate carrier is continuously moved and cylindrical.

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Patent Owner(s)

Patent OwnerAddress
VON ARDENNE ANLAGENTECHNIK GMBHPLATTLEITE 19/29 DRESDEN 01324

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gross, Harald Langebrück, DE 25 430

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