Substrate treatment installation with adjustable thermal insulation for controlling substrate temperature
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United States of America Patent
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Dec 16, 2014
Grant Date -
May 17, 2012
app pub date -
Jun 18, 2010
filing date -
Jun 19, 2009
priority date (Note) -
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Abstract
A substrate-treatment installation includes a vacuum chamber, a substrate treatment device within the vacuum chamber, a substrate transport device within the vacuum chamber for guiding a substrate along a longitudinal direction in a substrate transport plane past the substrate treatment device, and a device for controlling substrate temperature. The substrate temperature controlling device includes a heat-absorbing cooler on one side of the substrate transport plane and an insulation member selectively displaceable between at least two different positions to vary extent of thermal shielding of the heat-absorbing cooler relative to the substrate transport plane by the insulation member.
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