Irradiation device
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United States of America Patent
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Dec 16, 2014
Grant Date -
May 9, 2013
app pub date -
Nov 9, 2012
filing date -
Nov 9, 2011
priority date (Note) -
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Abstract
One spectrum correction filter that changes a spectral characteristic of emission light from the light source, at least one neutral density filter disposed on the same optical axis of the spectrum correction filter, wherein the at least one spectrum correction filter and/or the at least one neutral density filter is tilted so that a travel direction of reflection light reflected from the at least one spectrum correction filter is deviated from the optical axis.
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