Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor

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United States of America Patent

PATENT NO 8906453
SERIAL NO

13418979

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Abstract

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A tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor includes a body including outer walls sized for enclosing the rods within the outer walls. Each outer wall includes a door for allowing access to at least one of the rods.

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Patent Owner(s)

Patent OwnerAddress
GLOBALWAFERS CO LTDNO 8 INDUSTRIAL EAST ROAD 2 SCIENCE-BASED INDUSTRIAL PARK HSINCHU

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bovo, Rodolfo Merano, IT 7 14
Gava, Diego Merano, IT 2 11
Molino, Paolo Merano, IT 4 13

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