Probe head for a microelectronic contactor assembly, and methods of making same
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United States of America Patent
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Dec 2, 2014
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app pub date -
Feb 19, 2010
filing date -
Feb 19, 2009
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Abstract
Microelectronic contactors on a probe contactor substrate, or adhesive elements on a probe contactor or space transformer substrate, are protected by a sacrificial material as 1) the microelectronic contactors or adhesive elements are planarized, or 2) a surface of the substrate on which the microelectronic contactors or adhesive elements are formed is planarized. The adhesive elements are used to bond the probe contactor substrate to the space transformer substrate.
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