Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabricated devices and systems
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United States of America Patent
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Nov 25, 2014
Grant Date -
Oct 13, 2011
app pub date -
Mar 29, 2011
filing date -
Mar 29, 2010
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Abstract
An improved method for the fabrication of Micro-Electro-Mechanical Systems (MEMS), Nano-Electro-Mechanical Systems (NEMS), Photonics, Nanotechnology, 3-Dimensional Integration, Micro- and Nano-Fabricated Devices and Systems for both rapid prototyping development and manufacturing is disclosed. The method includes providing a plurality of different standardized and repeatable process modules usable in fabricating the devices and systems, defining a process sequence for fabricating a predefined one of the devices or systems, and identifying a series of the process modules that are usable in performing the defined process sequence and thus in fabricating the predefined device or system.
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