Active oscillation isolation system by means of a hysteresis-free pneumatic bearing
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United States of America Patent
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Nov 25, 2014
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app pub date -
Aug 15, 2007
filing date -
Aug 31, 2006
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Abstract
Method and arrangement for oscillation isolation by means of an air bearing. The electropneumatic valves (4) for the compressed-air supply to the air bearing are subjected to a dither signal. This causes additional vibration of the mass 1 to be isolated. A compensation signal transmitter (12) ensures that additional vibration of the mass (1) is suppressed, by controlling actuators (10). Overall, hysteresis effects are avoided in the control of the compressed-air flow.
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