Method and apparatus for fabrication of carbon nanotubes using an electrostatically charged substrate and liner
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United States of America Patent
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Nov 18, 2014
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N/A
app pub date -
Sep 27, 2011
filing date -
Sep 27, 2011
priority date (Note) -
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Abstract
A system for use in fabrication of carbon nanotubes (CNTs) includes a wafer having a circuitry and a plurality of CNT seed sites. The system also includes a base assembly configured to support the wafer. The system further includes a first tube disposed over the wafer and configured to surround the CNTs that form on the seed sites. The circuitry in the wafer is configured to conduct at least one static charge. The wafer includes a top surface having a plurality of CNT seed sites, each seed site coupled to the circuitry and configured to receive one of the at least one static charge.
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International Classification(s)
- C01B:NON-METALLIC ELEMENTS; COMPOUNDS THEREOF
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B82Y:SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; ....
- B05B:SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B01J:CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, CO....
- D01F:CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL....
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