Method for manufacturing a pendulous accelerometer

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United States of America Patent

PATENT NO 8887382
SERIAL NO

12329122

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Abstract

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The invention relates to a pendulous accelerometer including a pendulous electrode formed in a substrate, at least one counter electrode, and an encapsulation cover. The at least one counter electrode is formed under the cover, and spacers are positioned between the cover and the substrate.

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Patent Owner(s)

Patent OwnerAddress
MEMSCAPPARC TECHNOLOGIQUE DES FONTAINES BERNIN CROLLES 38920

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hames, Greg Raleigh, US 6 13
Veneau, Jean-Francois Eybens, FR 1 2
Wenk, Béatrice Grenoble, FR 3 1

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