Driving at least two high frequency-power generators
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 11, 2014
Issued Date -
N/A
app pub date -
Nov 5, 2007
filing date -
Nov 4, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
For driving at least two HF power generators that supply a plasma process with HF power, at least one drive signal is generated and at least one pulse signal is generated. Then, based on the at least one drive signal and the at least one pulse signal, a pulsed HF power signal is generated by each of the at least two HF power generator.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully