Scanning probe microscopy cantilever comprising an electromagnetic sensor
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United States of America Patent
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Oct 28, 2014
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N/A
app pub date -
Aug 9, 2012
filing date -
Aug 11, 2011
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Abstract
An apparatus and method directed to a scanning probe microscopy cantilever. The apparatus includes body and an electromagnetic sensor having a detectable electromagnetic property varying upon deformation of the body. The method includes scanning the surface of a material with the cantilever, such that the body of the cantilever undergoes deformations and detecting the electromagnetic property varying upon deformation of the body of the cantilever.
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