Thin film battery fabrication using laser shaping

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United States of America Patent

PATENT NO 8870974
APP PUB NO 20090208671A1
SERIAL NO

12032997

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Abstract

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A method of fabricating a battery comprises selecting a battery substrate having cleavage planes, and depositing on the battery substrate, one or more battery component films comprising electrode films that at least partially surround an electrolyte film. Pulsed laser beam bursts are applied to the battery component films at a sufficiently high power level to vaporize portions of the films to form shaped battery features. The pulsed laser bursts shape the films substantially without causing fractures along the cleavage planes of the battery substrate. Pulsed laser shaping can be used to replace the use of a mask in the fabrication of shaped battery components.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Li, Jianchao El Monte, US 12 282
Nieh, Kai-Wei Monrovia, US 24 1048
Shih, Tung-Hsiu Ceritos, US 10 204

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