Plasma supply device
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United States of America Patent
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Oct 21, 2014
Grant Date -
Aug 22, 2013
app pub date -
Mar 21, 2013
filing date -
Jul 23, 2007
priority date (Note) -
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Abstract
A plasma supply device generates an output power greater than 500 W at an essentially constant basic frequency greater than 3 MHz and powers a plasma process to which is supplied the generated output power, and from which reflected power is returned to the plasma supply device. The plasma supply device includes at least one inverter connected to a DC power supply, which inverter has at least one switching element, and an output network, wherein the at least one output network includes at least one inductance that has at least one magnetic field strengthening element that is a Perminvar ferrite.
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