Method for producing carbon micro- and nano-coils using sulfur hexafluoride gas
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United States of America Patent
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Oct 21, 2014
Grant Date -
Mar 6, 2014
app pub date -
Oct 17, 2012
filing date -
Aug 28, 2012
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Abstract
The present invention relates to a method for producing carbon micro- and nano-coils using sulfur hexafluoride gas, wherein the carbon micro- and nano-coils are synthesized and grown on a ceramic substrate and sulfur hexafluoride is introduced during the synthesis of the carbon coils to control the geometry of the carbon coils. The invention also discloses a method of producing carbon micro- and nano-coils by synthesizing and growing the carbon coils on a substrate using a chemical vapor deposition system, wherein sulfur hexafluoride (SF6), acetylene (C2H2) and hydrogen (H2) gases are introduced into a chamber during synthesis of the carbon coil, and wherein the sulfur hexafluoride and acetylene gases are introduced alternately for predetermined amounts of time, or any one or more of the flow rate, time or time point of introduction of the sulfur hexafluoride, thereby controlling the shape, length and geometry of the carbon coils.
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