Sputtering lithium-containing material with multiple targets
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United States of America Patent
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Oct 21, 2014
Grant Date -
Jun 27, 2013
app pub date -
Dec 23, 2011
filing date -
Dec 23, 2011
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Abstract
A method of depositing lithium-containing films on a battery substrate in a sputtering chamber is provided. At least one pair of sputtering targets that each comprise a lithium-containing sputtering member is provided in the sputtering chamber, the sputtering targets selected to each have a conductivity of at least about 5×10−6 S·cm−1. A substrate carrier holding at least one battery substrate is placed in the sputtering chamber. A pressure of sputtering gas is maintained in the sputtering chamber. The sputtering gas is energized by applying to the pair of sputtering targets, an electrical power at a frequency of from about 10 to about 100 kHz.
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