Method for manufacturing a mirror device by means of a plurality of sacrificial layers
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United States of America Patent
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Oct 14, 2014
Grant Date -
Aug 20, 2009
app pub date -
Mar 12, 2009
filing date -
Nov 1, 2003
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Abstract
A method for manufacturing a device comprising an elastic member on a substrate includes steps of: forming a sacrificial layer by forming a plurality of sacrificial sub-layers on the substrate; forming a plate member in or on the sacrificial layers connected to the substrate and substantially parallel to a top surface of the substrate; and removing the sacrificial sub-layers after forming the plate member by removing the sacrificial sub-layers in an order different from the reverse order of forming the sacrificial sub-layers.
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