Piezoelectric microcantilevers and uses in atomic force microscopy
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United States of America Patent
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Oct 14, 2014
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Jun 14, 2011
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Nov 28, 2006
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Abstract
The invention is direct to a piezoelectric microcantilever for static contact and dynamic noncontact atomic force microscopy which may be carried out in solution. The piezoelectric microcantilever, which includes a piezoelectric layer and a non-piezoelectric layer is capable of self actuation and detection. The piezoelectric layer may be constructed from a lead magnesium niobate-lead titanate (Pb(Mg1/3Nb2/3)O3)0.65—(PbTiO3)0.35(PMN0.65-PT0.35) (PMN-PT), zirconate titanate (PZT)/SiO2 or from any lead-free piezoelectric materials such as doped sodium-potassium niobate-lithium niobate. The piezoelectric layers of the microcantilevers may have dielectric constants of from 1600-3000 and thicknesses below 10 μm. Also disclosed are methods for fabricating microcantilever sensors and methods for atomic force microscopy employing the microcantilevers.
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