Control systems and methods for compensating for effects of a stage motor
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United States of America Patent
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Oct 7, 2014
Grant Date -
Sep 23, 2010
app pub date -
Mar 18, 2009
filing date -
Mar 18, 2009
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Abstract
Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.
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