Alkali earth metal precursors for depositing calcium and strontium containing films
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United States of America Patent
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Oct 7, 2014
Grant Date -
Sep 24, 2009
app pub date -
Mar 18, 2009
filing date -
Mar 19, 2008
priority date (Note) -
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Abstract
Methods and compositions for the deposition of a film on a substrate. In general, the disclosed compositions and methods utilize a precursor containing calcium or strontium.
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B05D:PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....
- C07F:ACYCLIC, CARBOCYCLIC, OR HETEROCYCLIC COMPOUNDS CO....
- H05B:ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE ....
- C04B:LIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREO....
- H01B:CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATER....
- C08B:POLYSACCHARIDES; DERIVATIVES THEREOF
- H05H:PLASMA TECHNIQUE
- H01T:SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS....
- C21B:MANUFACTURE OF IRON OR STEEL
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