Parallel substrate treatment for a plurality of substrate treatment lines
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United States of America Patent
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Oct 7, 2014
Grant Date -
Jan 1, 2009
app pub date -
Jun 27, 2008
filing date -
Jun 29, 2007
priority date (Note) -
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Abstract
A substrate treating apparatus includes a plurality of substrate treatment lines arranged vertically. Each substrate treatment line has a plurality of main transport mechanisms arranged horizontally, and a plurality of treating units provided for each main transport mechanism for treating substrates. A series of treatments is carried out for the substrates, with each main transport mechanism transporting the substrates to the treating units associated therewith, and transferring the substrates to the other main transport mechanism horizontally adjacent thereto. The substrate treating apparatus realizes increased processing capabilities by treating the substrates in parallel through the substrate treatment lines.
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