Electromechanic microsensor
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United States of America Patent
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Oct 7, 2014
Grant Date -
Dec 22, 2011
app pub date -
Feb 3, 2010
filing date -
Feb 27, 2009
priority date (Note) -
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Abstract
The invention relates to an electromechanic microsensor (MEMS) comprising drive elements which are moved linearly in an x-y plane and disposed on a substrate to determine at least two, preferably three, components of the yaw rate vector of a substrate, wherein two groups of drive elements are driven in directions running essentially at right angles to each other. The MEMS according to the invention is characterized in that the drive elements, which are moved at right angles to each other, are connected to one another to synchronize the movements via a coupling device that is rotatably mounted on the substrate.
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