Seal and fixation assembly for a rotating cylindrical magnetron electrode
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United States of America Patent
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Sep 30, 2014
Grant Date -
Jun 14, 2012
app pub date -
Dec 2, 2011
filing date -
Dec 3, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
A seal and fixation assembly includes a cylindrical target having an inside surface with a shoulder that forms a stop within the target. A target retaining ring is disposed about the target. A seal plate is disposed within the target and engages the stop and the inside surface of the target. An end cap is disposed on the end of the target and includes a portion with a beveled surface within the target. A sealing element is disposed between the inside surface of the target, the seal plate, and the beveled surface of the end cap. A clamp is disposed over the end cap and the target retaining ring. Engagement of the end cap and the target retaining ring with the clamp causes the end cap to move within the target toward the stop to compress the sealing element between the target, the seal plate, and the beveled surface.
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